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1999
[MANC-99]
G. Mancina
,
R. Prost
,
G. Prudon
,
B. Gautier
, and
J. C. Dupuy
,
"
Deconvolution SIMS depth profiles: toward the limits of the resolution by self-deconvolution test
",
Proceeding SIMS XII
, Brussels, Belgium, pp. 497–500, 1999.
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1997
[GAUT-97]
B. Gautier
,
J. C. Dupuy
,
R. Prost
, and
G. Prudon
,
"
Effectiveness and Limits of the Deconvolution of SIMS Depth Profiles of Boron in Silicon
",
Surf Interface Anal
, vol. 25, pp. 464-477, 1997.
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1996
[GAUT-96]
B. Gautier
,
R. Prost
,
G. Prudon
, and
J. C. Dupuy
,
"
Deconvolution of SIMS depth profiles of boron in silicon
",
Surf Interface Anal
, vol. 24, pp. 733-745, 1996.
RTF
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XML
BibTex
Google Scholar