| Title | Effectiveness and Limits of the Deconvolution of SIMS Depth Profiles of Boron in Silicon |
| Publication Type | Journal Article |
| Authors | Gautier, B, Dupuy, JC, Prost, R, Prudon, G |
| Full Text |
Effectiveness and Limits of the Deconvolution of SIMS Depth Profiles of Boron in Silicon