Title | Deconvolution SIMS depth profiles: toward the limits of the resolution by self-deconvolution test |
Publication Type | Invited Conference |
Authors | Mancina, G, Prost, R, Prudon, G, Gautier, B, Dupuy, JC |
Secondary Authors | Benninghoven, A, Bertrand, P, Migeon, HN, Werner, HW |
Full Text |
Deconvolution SIMS depth profiles: toward the limits of the resolution by self-deconvolution test